Laser & Optoelectronics Progress, Volume. 61, Issue 3, 0314003(2024)

Femtosecond Laser Direct-Writing Optical Waveguide Amplifiers and Lasers (Invited)

Xiangyu Sun1, Zhi Chen1、*, Yuying Wang2, Daoyuan Chen2, Xiaofeng Liu3, Zhijun Ma1, Lijing Zhong4、**, and Jianrong Qiu2,4
Author Affiliations
  • 1Zhejiang Lab , Hangzhou 311100, Zhejiang , China
  • 2College of Optical Science and Engineering, Zhejiang University, Hangzhou 310027, Zhejiang , China
  • 3School of Materials Science and Engineering, Zhejiang University, Hangzhou 310027, Zhejiang , China
  • 4Institute of Light+X Science and Technology, College of Information Science and Engineering, Ningbo University, Ningbo 315211, Zhejiang , China
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    Figures & Tables(14)
    Femtosecond laser direct-writing optical waveguide system. (a) Schematic diagram of femtosecond laser direct-writing optical waveguide platform[18]; (b) four types of optical waveguide structures prepared by using femtosecond lasers in transparent media, including Type-I, Type-II, ridge, and variable cross-section optical waveguide[21]
    Structure and mode field images of Type-I optical waveguide[21]. (a) Microscopic end face image of Type-I optical waveguide; (b) mode field of Type-I optical waveguide at a wavelength of 633 nm
    Schematic diagrams of various Type-II optical waveguide structures[21, 58-59]. (a) Schematic diagram of Type-II optical waveguide directly-written by femtosecond laser; (b) double line Type-II optical waveguide and mode field generated by laser direct-writing in LiNbO3 crystal; (c) Y-type Type-II optical waveguide directly-written by femtosecond laser in BiB3O6 crystal; (d) microscopic images with an 8-orbit diamond structure; (e) the induction of multifocal corresponding horizontal waveguides by femtosecond laser in LiTaO3; (f) propagation modes of Type-II type Cr doped sapphire waveguides with single wire structure at 632 nm under different annealing temperatures, the inset shows the propagation mode of the waveguide at 632 nm at three different temperatures; (g) "cladding+dual-line" waveguide; (h) photonic lattice waveguide
    Preparation and schematic diagrams of different ridge-type optical waveguides[3]. (a) Laser lithography assisted chemical mechanical etching technology; (b) micro-disk structure of erbium doped lithium niobate thin film; (c) optical micrograph of integrated micro-ring structure on chip; (d) cross section diagram of Z-cut Er3+∶TFLN lithium niobate cladding waveguide with Ta2O5 cladding deposited on top; (e) monolithic integrated erbium doped lithium niobate waveguide; (f) microimage of Er3+∶TFLN FP resonant cavity based on Sagnac ring reflector
    Femtosecond laser direct-writing of variable cross-section optical waveguides[7,35]. (a) Schematic diagram of femtosecond laser direct-writing variable cross-section optical waveguide; (b)(c) schematic diagrams of the optical waveguide structure of LP01 mode and LP11 mode; (d) the optical waveguide mode field diagrams of LP01 mode and LP11 mode at wavelengths of 532 nm, 633 nm, 976 nm, and 1550 nm, respectively; (e)‒(h) end face and top view of fork grating optical waveguide at input and output terminals
    Amplifier based on Type-I optical waveguide, the net gain curve (red solid line) in the range of 1530 nm to 1565 nm of a 22 mm waveguide directly-written by a 885 kHz KYW laser, the blue dashed line represents the insertion loss of the waveguide[18]
    Type-II optical waveguide amplifier[26]. (a) Schematic diagram of the testing system for Type-II optical waveguide amplifier; (b) transmission loss; (c) the variation curve of output SH power (peak) and SHG conversion efficiency with fundamental wavelength input power
    Ridge type optical waveguide amplifier based on Er3+ doped lithium niobate thin film[3]. (a) Schematic diagram of waveguide gain measurement system; (b) schematic diagram of a four-channel optical waveguide amplifier; (c) overall physical diagram of a four-channel amplifier; (d) the mode distribution and intensity distribution of 1550 nm signal light in a four-channel Er3+ doped waveguide (inset); (e) optical images of a four-channel array optical waveguide amplifier pumped by a 976 nm laser; (f) gain characteristic curves at 1550 nm; (g) gain characteristic curves at 1530 nm
    High-order mode optical waveguide amplifier[35]. (a) An optical measurement system for high-order mode optical waveguide amplifiers,insets are designed LP01 and LP11 optical waveguide structures and corresponding mode field simulations; (b) the relationship between the gain of LP11 high-order mode optical waveguide and pump power; (c) the peak intensity plots of LP11 high-order mode optical waveguide with or without pumped laser; (d) net gain spectrum of LP11 high-order mode optical waveguide in a window of 1500‒1600 nm
    Waveguide laser output using a bidirectional pumping scheme[18]. (a) A measurement system for achieving waveguide laser output using a bidirectional pumping scheme; (b) waveguide laser input and output characteristic curves at 1534 nm, inset shows laser output spectra at pump power of 55 mW and 80 mW, respectively
    Lasers based on Type-II optical waveguide[2]. (a)‒(e) Lasing mode distribution at 1 μm based on Type-II optical waveguide, including: (a) (b) y-type; (c) 1×4 type ; (d) circular shape; (e) photonic lattice; (f) laser direct-writing schematic diagram of Type-II S curved optical waveguide; (g) dual wavelength lasing spectra at 1064 and 1079 nm; (h) frequency spectrum of the output laser at 31.69 GHz
    A compact hybrid lithium niobate micro-ring waveguide laser pumped by a laser diode[3]. (a) Schematic diagram of the integrated micro-ring waveguide laser structure, consisting of a CoS packaged semiconductor laser and a high-Q-value Er3+∶TFLN micro-ring laser; (b) optical image of a compact hybrid lithium niobate micro-ring laser; (c) optical micrographs of the interface between the semiconductor laser packaged with CoS and the Er3+∶TFLN microring waveguide; (d) lasing spectra of the micro-ring waveguide laser; (e) the relationship curve between the laser output power and pump power of a micro ring waveguide laser; (f) the relationship curve between laser output power and driving electrical power of micro ring waveguide laser
    A variable cross-section optical waveguide vortex laser[7].(a) Schematic diagram of the experimental setup for generation and measurement of a variable cross-section optical waveguide vortex laser, inset shows the pump laser and the output vortex laser spectra; (b)‒(g) mode intensity distribution of far-field output laser, inset shows the corresponding two-dimensional intensity distribution, the numbers in parentheses represent the order of diffraction; (h)‒(m) the mode intensity distribution of the output laser obtained at the focal point of the cylindrical lens, l represents opological charge; (n)‒(s) relationship curve between output power and pump power of vortex laser with variable cross-section optical waveguide
    • Table 1. Summary of reported results for Type-II optical waveguide lasers emitting at different wavelengths based on various laser-cavity

      View table

      Table 1. Summary of reported results for Type-II optical waveguide lasers emitting at different wavelengths based on various laser-cavity

      Wavelength

      band

      Gain media

      Working

      wavelength /nm

      Cavity configurationOperation regime

      Lasing

      threshold /mW

      Maximum output power /mW

      Slope

      efficiency /%

      Reference
      VisibleNd∶YCOB531CladdingCW50.175
      Nd∶YAB532Dual lineCW0.03276
      Pr∶SrAl12 O19634.5Dual lineCW19028.1874
      Pr;Mg∶SrAl12 O19525.3Dual lineCW10883677
      64451610653760
      724.98855042578
      Pr∶LiYF4604Rhombic claddingCW360255.6079
      720243122.0080
      Ti∶sapphire700 to 870Dual lineCW8414323.5081
      798.5Dual lineCWML(21.25 GHz)1160.187.4882
      NIRYb;Na∶CaF21013.9 and 1027.9CladdingCW and Q-switched152.226.61083
      Yb∶YAG1030S-curved dual lineCW1411 W7984
      Y-branch dual lineCW2712.29 W5285
      Dual lineQ-switched1025.6 W7486
      Dual lineQML(2 GHz)180032211.3087
      Double claddingCW401.745.83888
      Yb∶KLuW1040Surface claddingQ-switched4916806189
      Nd∶YAG1064Annular ring shapedCW191842090
      Ear-like claddingCW and Q-switched1032734.4091
      CladdingQ-switched287102.311.9092
      QML(8.8 GHz)741272693
      1061.58 and 1064.18CladdingCWML(9.8 GHz)53092
      1064Y-branch claddingCW23117222.4094
      1×2 splittersCW903333495
      1×4 splitters902172296
      Ring shapedCW andQ-switched1482242216
      Nd∶YVO41064CladdingCW10.3 W3.4 W3697
      Q-switched57.42753798
      QML(6.5 GHz)CWML(6.5 GHz)654245699
      CWML(6.5 GHz)19.325930.60100
      Double claddingQ-switched5939746101
      Optical-lattice likeQ-switched8520102
      Nd∶YAP1064 and 1079CladdingCW243199.833.40103
      S-curved claddingQML(7.9 GHz)1967714.10104
      S-curved optical-lattice2285710.69105
      like
      1072 and 1079Optical-lattice likeCW384.5101.330.90106
      Nd∶GdVO41063.6Dual lineCW5225670107
      1064.5CladdingCW andQ-switched1785706822
      Nd∶GGG1061Dual lineCW291125104
      1063CladdingCW27020944.40108
      Nd∶YSAG1062Optical-lattice likeQ-switched58.5133.828.30109
      Nd∶LuVO41066.4Dual lineCW983014105
      Nd∶KGW1065Dual lineCW1413352.30106
      1067CladdingCW120198.539.40107
      MIRTm∶KLu(WO421847.4Surface claddingCW52171.137.80110
      1846.8Q-switched50015034.60
      1849.6CladdingCW4524748.70111
      1844.8Q-switched24.99.30
      1847Optical-lattice likeCW21469.90112
      1841 to 1848Y-branch claddingCW28046040.60113
      Tm∶YLF1877CladdingQ-switched421.61922
      Tm∶YAG1943.5CladdingQML(7.8 GHz)6656.52114
      Ho∶KGd(WO422055CladdingCW18021267.30115
      Tm∶MgWO42080Surface claddingCW12013238.90116
      Ho∶YAG2091CladdingQML(5.9 GHz)1706.8017
      2096CW100177516%117
      Cr∶ZnS2333CladdingCW45010120118
      Cr∶ZnSe2522CladdingCW520041119
      Fe∶ZnSe4070CladdingCW99558
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    Xiangyu Sun, Zhi Chen, Yuying Wang, Daoyuan Chen, Xiaofeng Liu, Zhijun Ma, Lijing Zhong, Jianrong Qiu. Femtosecond Laser Direct-Writing Optical Waveguide Amplifiers and Lasers (Invited)[J]. Laser & Optoelectronics Progress, 2024, 61(3): 0314003

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    Paper Information

    Category: Lasers and Laser Optics

    Received: Sep. 28, 2023

    Accepted: Nov. 7, 2023

    Published Online: Feb. 22, 2024

    The Author Email: Zhi Chen (zhichen@zhejianglab.edu.cn), Lijing Zhong (zlight.optics@gmail.com)

    DOI:10.3788/LOP232213

    CSTR:32186.14.LOP232213

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