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Piezoelectrics & Acoustooptics, Volume. 44, Issue 5, 709(2022)

Study on Acoustic Excitation Characteristics of AlN Thin Film Heterogeneous Structure

QI Mengke1, LI Menghui1, CHENG Yimin1, PAN Hongzhi2, CAO Liang1, and MU Xiaojing1
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    QI Mengke, LI Menghui, CHENG Yimin, PAN Hongzhi, CAO Liang, MU Xiaojing. Study on Acoustic Excitation Characteristics of AlN Thin Film Heterogeneous Structure[J]. Piezoelectrics & Acoustooptics, 2022, 44(5): 709

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    Special Issue:

    Received: Aug. 17, 2022

    Accepted: --

    Published Online: Jan. 27, 2023

    The Author Email:

    DOI:10.11977/j.issn.1004-2474.2022.05.009

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology