Two kinds of thin film heterogeneously stacked resonators based on AlN piezoelectric material and 10% Sc-doped AlN piezoelectric material respectively have been developed in this paper. The effect of Sc doping on the acoustic excitation of the resonator and the frequency-temperature performance of the device are compared and analyzed by the finite element simulation and experiment. The results show that Sc doping may affect the resonant frequency, electromechanical coupling coefficient and corresponding frequency-temperature coefficient (TCF) of the acoustic wave excited by the piezoelectric thin-film stacked resonator, and has different effects on the TCF of the resonant and anti-resonant points of the excited acoustic wave. This work has great application potential in the field of sensors and filters.