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Chinese Journal of Lasers, Volume. 47, Issue 11, 1103001(2020)

Performance of Broadband Low Dispersion Mirrors with High Damage Threshold

Zhang Yuhui1,2,3, Wang Yanzhi1,3,4, Chen Ruiyi1,2,3, Wang Zhihao1,2,3, Zhao Jiaoling1,3,4, Li Dawei1,3,4, Zhao Yuanan1,3,4, Zhu Meiping1,3,4, Yi Kui1,3,4, Jin Yunxia1,3,4, He Hongbo1,3,4, Leng Yuxin4,5, and Shao Jianda1,3,4
Author Affiliations
  • 1Thin Film Optics Laboratory, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China
  • 2Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China
  • 3Key Laboratory of High Power Laser Materials, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China
  • 4CAS Center for Excellence in Ultra-Intense Laser Science, Chinese Academy of Sciences, Shanghai 201800, China
  • 5State Key Laboratory of High Field Laser Physics, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China
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    AbstractGet PDF(in Chinese)
    Figures&Tables (8)
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    Figures & Tables(8)
    Dispersion performance of low dispersion mirrors. (a) Metal-dielectric mirrors; (b) dielectric mirrors

    Fig. 1. Dispersion performance of low dispersion mirrors. (a) Metal-dielectric mirrors; (b) dielectric mirrors

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    Reflectivity of low dispersion mirrors. (a) Metal-dielectric mirrors; (b) dielectric mirrors

    Fig. 2. Reflectivity of low dispersion mirrors. (a) Metal-dielectric mirrors; (b) dielectric mirrors

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    Damage thresholds. (a) Metal films and metal-dielectric mirrors; (b) dielectric mirrors

    Fig. 3. Damage thresholds. (a) Metal films and metal-dielectric mirrors; (b) dielectric mirrors

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    Damage morphology of Ag+SiO2. (a) Surface morphology; (b) cross-sectional morphology

    Fig. 4. Damage morphology of Ag+SiO2. (a) Surface morphology; (b) cross-sectional morphology

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    Damage morphology of Ta2O5-HfO2/SiO2. (a) Surface morphology; (b) local enlargement of damage edge

    Fig. 5. Damage morphology of Ta2O5-HfO2/SiO2. (a) Surface morphology; (b) local enlargement of damage edge

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    Damage pit depth of Ta2O5-HfO2/SiO2

    Fig. 6. Damage pit depth of Ta2O5-HfO2/SiO2

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    Normalized electric field distributions of dielectric mirrors. (a) Ta2O5/SiO2 dielectric mirror; (b) Ta2O5?HfO2/SiO2 ternary composite dielectric mirror

    Fig. 7. Normalized electric field distributions of dielectric mirrors. (a) Ta2O5/SiO2 dielectric mirror; (b) Ta2O5?HfO2/SiO2 ternary composite dielectric mirror

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    • Table 1. Design parameters of low dispersion mirrors

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      Table 1. Design parameters of low dispersion mirrors

      SampleMaterialLayer system
      Au150 nm Au
      Metal mirrorAg150 nm Ag
      Al150 nm Al
      Au+SiO2Au+4L SiO2
      Metal-dielectric mirrorAg+SiO2Ag+4L SiO2
      Al+SiO2Al+4L SiO2
      Tradition mirrorTa2O5+SiO2(HL)^20H
      Ternary composite mirrorTa2O5+HfO2+SiO2(HL)^18(ML)^2M
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    Zhang Yuhui, Wang Yanzhi, Chen Ruiyi, Wang Zhihao, Zhao Jiaoling, Li Dawei, Zhao Yuanan, Zhu Meiping, Yi Kui, Jin Yunxia, He Hongbo, Leng Yuxin, Shao Jianda. Performance of Broadband Low Dispersion Mirrors with High Damage Threshold[J]. Chinese Journal of Lasers, 2020, 47(11): 1103001

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    Paper Information

    Category: materials and thin films

    Received: Jun. 15, 2020

    Accepted: --

    Published Online: Oct. 23, 2020

    The Author Email:

    DOI:10.3788/CJL202047.1103001

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology