Fig. 1. Variations of gas concentraion in discharge region and laser output energy. (a) SF6; (b) C2H6; (c) HF; (d) laser output energy

Fig. 2. Calculated HF molecular concentration in discharge region

Fig. 3. Molecular concentrations of working gases. (a) SF6; (b) C2H6

Fig. 4. Calculated HF molecular concentration

Fig. 5. Calculated HF laser pulse energy

Fig. 6. Effect of calculated HF molecular concentration on output laser pulse energy

Fig. 7. Calculated results with molecular sieve absorption for laser repetition rate of 100 Hz. (a)(c) HF molecular concentrations in discharge region; (b)(d) normalized laser pulse energies

Fig. 8. Experimental results of HF molecular concentrations in laser chamber together with normalized pulse energies at repetition rate of 100 Hz. (a)(b) Without molecular sieves in laser chamber; (c)(d) with molecular sieves in laser chamber