Acta Photonica Sinica, Volume. 54, Issue 4, 0422003(2025)

Design of Long Working Distance and Wide Wavelength Range Microscope Objective for Industrial Detection

Yangyu SHEN1, Teng QIN1, Jiyan ZHANG1、*, Muwang HUANG2, Liting SUN1, Zhengyu LIN1, and Tianhao CAO1
Author Affiliations
  • 1College of Optoelectronics and Communication Engineering,Xiamen University of Technology,Xiamen 361024,China
  • 2Fujian Foctek Optoelectronics Co.,Ltd.,Fuzhou 350100,China
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    Figures & Tables(22)
    Typical structure of long working distance objective
    Front part structure of long working distance objective
    Initial structure of microscope objective
    Optical structure of microscope objective
    MTF curves and distortion curves
    Optical structure of tube lens
    MTF curves of tube lens
    Overall combination of microscope objective
    MTF curves of microscope objective
    Spot diagram of microscope objective
    Plot of energy concentration of microscope objective
    Later color aberration curves of microscope objective
    Core adjustment diagram of microscope objective
    MTF curves of microscope objective before and after core adjustment
    Mechanical structure of microscope objective
    The actual produced lens
    Core adjustment device of microscope objective
    Star tester of microscope objective before and after core adjustment
    Resolution test results of microscope objective
    • Table 1. Objective design specifications

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      Table 1. Objective design specifications

      System parametersValue

      Working wavelength/nm

      Working distance/mm

      Total length/mm

      Numerical aperture

      Magnification

      Object field of view/mm

      Image field of view/mm

      Distortion

      430~900

      >20

      <95

      >0.4

      20×

      1.2

      24

      <1%

    • Table 2. Tolerance parameter value

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      Table 2. Tolerance parameter value

      Tolerance typeTolerance range
      Radius of curvature/fringes3
      Thickness/mm±0.02
      Tilt of the lens group/(°)±0.05
      Lens group decentration/mm±0.015
      Refractive index deviation±0.001
      Abbe number deviation/%±0.3
    • Table 3. Top 10 sensitive items

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      Table 3. Top 10 sensitive items

      TypeSurfaceValueCriterionChange

      TEDY

      TEDY

      TETX

      TETX

      TETX

      TETX

      TEDY

      TEDY

      TABB

      TEDY

      12 15

      12 15

      12 15

      12 15

      18 19

      18 19

      7 9

      7 9

      7

      16 17

      -0.010 0

      0.010 0

      -0.050 0

      0.050 0

      -0.050 0

      0.050 0

      -0.010 0

      0.010 0

      -0.118 61

      -0.010 0

      0.100 0

      0.100 0

      0.093 0

      0.093 0

      0.090 1

      0.090 1

      0.081 3

      0.081 3

      0.078 3

      0.075 1

      0.046 8

      0.046 8

      0.039 8

      0.039 8

      0.036 9

      0.036 9

      0.028 1

      0.028 1

      0.025 1

      0.021 9

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    Yangyu SHEN, Teng QIN, Jiyan ZHANG, Muwang HUANG, Liting SUN, Zhengyu LIN, Tianhao CAO. Design of Long Working Distance and Wide Wavelength Range Microscope Objective for Industrial Detection[J]. Acta Photonica Sinica, 2025, 54(4): 0422003

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    Paper Information

    Category: Optical Design and Fabrication

    Received: Oct. 16, 2024

    Accepted: Jan. 15, 2025

    Published Online: May. 15, 2025

    The Author Email: Jiyan ZHANG (jyzhang@xmut.edu.cn)

    DOI:10.3788/gzxb20255404.0422003

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