Fig. 1. The working principle of the system

Fig. 2. The 16K color detector

Fig. 3. The overall structure

Fig. 4. The structure of prism

Fig. 5. Support structure of the prism

Fig. 6. The structure of prism assembly

Fig. 7. The test device

Fig. 8. Surface test results of the prism

Fig. 9. The optical system

Fig. 10. Design results of the optical transfer function

Fig. 11. Design results of the distortion

Fig. 12. Design results of the image surface illumination

Fig. 13. Picture of the optical lens

Fig. 14. Imaging resolution test device

Fig. 15. The images of 3# resolution chart

Fig. 16. Photoelectric test method for the image surface illumination uniformity

Fig. 17. Test device of the image surface illuminance uniformity

Fig. 18. The wafer image