[1] Su R. Coherence scanning interferometry[M]. Leach R K. Advances in optical surface texture metrology(2020).

[2] de Groot P. Principles of interference microscopy for the measurement of surface topography[J]. Advances in Optics and Photonics, 7, 1-65(2015).

[3] Schmit J, Creath K, Wyant J C. Surface profilers, multiple wavelength, and white light intereferometry[M]. Malacara D. Optical shop testing, 667-755(2007).

[4] Harasaki A, Wyant J C. Fringe modulation skewing effect in white-light vertical scanning interferometry[J]. Applied Optics, 39, 2101-2106(2000).

[7] Xie W C, Lehmann P, Niehues J et al. Signal modeling in low coherence interference microscopy on example of rectangular grating[J]. Optics Express, 24, 14283-14300(2016).

[8] Li P. Surface topography evaluation and error compensation based on white light interferometry[D](2021).

[9] de Groot P, Colonna de Lega X, Kramer J et al. Determination of fringe order in white-light interference microscopy[J]. Applied Optics, 41, 4571-4578(2002).

[10] Sang M, Du X Y, Wang S et al. Gap-matching algorithm with the impCEEMDAN in scanning white-light interference microscopy[J]. Optics Express, 28, 15101-15111(2020).

[12] Lehmann P, Xie W C, Niehues J. Transfer characteristics of rectangular phase gratings in interference microscopy[J]. Optics Letters, 37, 758-760(2012).

[13] Xie W C. Transfer characteristics of white light interferometers and confocal microscopes[D](2017).

[14] Xie W C, Lehmann P, Niehues J. Lateral resolution and transfer characteristics of vertical scanning white-light interferometers[J]. Applied Optics, 51, 1795-1803(2012).

[15] de Groot P. Derivation of algorithms for phase-shifting interferometry using the concept of a data-sampling window[J]. Applied Optics, 34, 4723-4730(1995).

[16] Gao Z S, Yuan Q, Sun Y F et al. Micro-optical nondestructive testing method for microstructure (invited)[J]. Acta Photonica Sinica, 51, 0851501(2022).