Acta Optica Sinica, Volume. 25, Issue 1, 126(2005)
Influences of the Deposition Parameters and Aging Time on the Residual Stress of SiO2 Films
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[in Chinese], [in Chinese], [in Chinese], [in Chinese]. Influences of the Deposition Parameters and Aging Time on the Residual Stress of SiO2 Films[J]. Acta Optica Sinica, 2005, 25(1): 126
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