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Chinese Journal of Lasers, Volume. 42, Issue 6, 602003(2015)

Microlens Beam Shaping and Homogenizing Optical System for Excimer Laser

Jin Yuhua*, Zhao Yan, and Jiang Yijian
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    Article index updated: Sep. 7, 2025

    The article is cited by 6 article(s) CLP online library. (Some content might be in Chinese.)
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    Jin Yuhua, Zhao Yan, Jiang Yijian. Microlens Beam Shaping and Homogenizing Optical System for Excimer Laser[J]. Chinese Journal of Lasers, 2015, 42(6): 602003

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    Paper Information

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    Received: Dec. 10, 2014

    Accepted: --

    Published Online: Sep. 23, 2022

    The Author Email: Jin Yuhua (yhjin@emails.bjut.edu.cn)

    DOI:10.3788/cjl201542.0602003

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology