Piezoelectrics & Acoustooptics, Volume. 45, Issue 3, 359(2023)
Effect of Al2O3 Thickness on the Acoustic Mode and Performance of SAW Sensors
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LIU Qiang, LI Hongyuan, XU Hong. Effect of Al2O3 Thickness on the Acoustic Mode and Performance of SAW Sensors[J]. Piezoelectrics & Acoustooptics, 2023, 45(3): 359
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Received: Feb. 6, 2023
Accepted: --
Published Online: Dec. 5, 2023
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