Acta Optica Sinica, Volume. 31, Issue 4, 405002(2011)

Fabrication of Convex Blazed Grating By Ar+ Ion-Beam Etching

Wang Haibin1,2、*, Liu Quan2, and Wu Jianhong2
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
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    References(17)

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    [10] [10] Ji Yiqun. Hyperspectral Imaging Systems with a Convex Grating[D]. Suzhou: Soochow University, 2009

    [11] [11] Liu Quan, Ji Yiqun, Wu Jianhong et al.. Study on convex grating in hyperspectral imaging spectrometers[C]. SPIE, 2009, 7494: 74940N

    [12] [12] Y. Aoyagi, S. Namba. Blazed ion-etched holographic gratings[J]. Opt. Acta, 1976, 23: 701~707

    [14] [14] Lin Hui. Multilayer-Coated Gratings in the Extreme-Ultraviolet Wavelength Region: Fabrication of Bare Grating Substrates and Measurement and Analysis of Diffraction Efficiency[D]. Beijing:Tsinghua University,2008. 41~44

    [17] [17] Wang Haibin, Wu Jianhong, Liu Quan. Diffraction characteristics of convex rectangular grating[J]. Laser Journal, 2010, 31(4): 15~17

    CLP Journals

    [1] Xu Xiangdong, Liu Zhengkun, Qiu Keqiang, Liu Ying, Hong Yilin, Fu Shaojun. Fabrication of 1200 line/mm Laminar Grating for ARPES[J]. Acta Optica Sinica, 2011, 31(10): 1005008

    [2] Chen Zhili, Liu Weiguo. Nanodots Pattern and Optical Properties of Monocrystalline Silicon Induced by Low Energy Ion Beam[J]. Acta Optica Sinica, 2013, 33(9): 922003

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    Wang Haibin, Liu Quan, Wu Jianhong. Fabrication of Convex Blazed Grating By Ar+ Ion-Beam Etching[J]. Acta Optica Sinica, 2011, 31(4): 405002

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    Paper Information

    Category: Diffraction and Gratings

    Received: Jul. 2, 2010

    Accepted: --

    Published Online: Apr. 1, 2011

    The Author Email: Haibin Wang (haibinwang1978@sina.com)

    DOI:10.3788/aos201131.0405002

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