Research Progress on Preparation of Three-Dimensional Micro-Nano Connected Structures in Transparent Materials by Femtosecond Laser Material Reduction Method

Chaoyue Yan; Shengzhi Sun; Xiaofeng Liu; Jianrong Qiu

doi:10.3788/LOP223126

Laser & Optoelectronics Progress, Volume. 60, Issue 21, 2100001(2023)

Research Progress on Preparation of Three-Dimensional Micro-Nano Connected Structures in Transparent Materials by Femtosecond Laser Material Reduction Method

Chaoyue Yan¹, Shengzhi Sun^1、*, Xiaofeng Liu², and Jianrong Qiu³

Author Affiliations

¹Institute of Advanced Technology, Ningbo University, Ningbo 315211, Zhejiang , China

²State Key Laboratory of Silicon Materials, Zhejiang University, Hangzhou 310027, Zhejiang , China

³State Key Laboratory of Modern Optical Instrumentation, Zhejiang University, Hangzhou 310027, Zhejiang , China

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Chaoyue Yan, Shengzhi Sun, Xiaofeng Liu, Jianrong Qiu. Research Progress on Preparation of Three-Dimensional Micro-Nano Connected Structures in Transparent Materials by Femtosecond Laser Material Reduction Method[J]. Laser & Optoelectronics Progress, 2023, 60(21): 2100001

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Paper Information

Category: Reviews

Received: Nov. 22, 2022

Accepted: Dec. 19, 2022

Published Online: Oct. 26, 2023

The Author Email: Shengzhi Sun (sunshengzhi@nbu.edu.cn)

DOI:10.3788/LOP223126

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology