Acta Optica Sinica, Volume. 42, Issue 7, 0700001(2022)

Research Progress on Absorption Loss Control of Laser Coating

Jiahui Wen1,2, Meiping Zhu1,2,3、*, Jian Sun1, Jingping Li1, and Jianda Shao1,2,3
Author Affiliations
  • 1Laboratory of Thin Film Optics, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China
  • 2College of Materials Science and Optoelectronic Technology, University of Chinese Academy of Sciences, Beijing 100049, China
  • 3Hangzhou Institute for Advanced Study, University of Chinese Academy of Sciences, Hangzhou, Zhejiang 310024, China
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    Figures & Tables(12)
    Schematic diagram of co-evaporation deposition technology
    Laser damage resistance of competition samples grouped by deposition method[30]
    Schematic diagram of Co-IBS
    Absorption of coating materials. (a) Schematic diagram of SiO2 full spectrum absorption[3]; (b) light absorption mechanism for different bands
    Absorption measurement technology. (a) Schematic diagram of experimental setup and (b) measurement results of two-channel optical cavity ring-down technique[42]; (c) schematic diagram of PCI experimental setup[45]
    Defect centers and center wavelengths of absorption of fused silica[48]
    Calculated band structures and total density of hafnium oxide with oxygen vacancy[56]. (a)(b) Calculated band structures of hafnium oxide with VO-III and VO-IV (valence band edge is set at zero energy level, as displayed by dash lines); (c) total density of state (TDOS) of pure hafnium oxide and hafnium oxide with VO-III and VO-IV
    Multimaterial combination coating[68]. (a) Schematic of multimaterial coating; (b) spectra of three coatings
    Schematic diagrams of HR coating stack[69]. (a) Schematic of typical high-reflection coating stack of gravitational wave detector; (b) schematic of four-material coating
    Map of absorption of Ti doped Ta2O5 coating measured over 120 mm diameter[47]
    • Table 1. Absorption characteristics of SiO2 coating deposited by electron-beam evaporation[44]

      View table

      Table 1. Absorption characteristics of SiO2 coating deposited by electron-beam evaporation[44]

      BandAbsorption type (center wavelength of absorption)CharacteristicApproach
      UV and visible bandsOxygen defectMain absorption source
      Infrared bandWater absorption (2.95 μm)Magnitude of k is 10-2Thermal annealing
      Hydroxyl defect (2.73 μm)Magnitude of k is 10-3
    • Table 2. Low extinction coefficients of some materials and corresponding coating method

      View table

      Table 2. Low extinction coefficients of some materials and corresponding coating method

      MaterialDeposition processWavelength /nmExtinction coefficient
      E-Beam[86]3551×10-8
      SiO2IBS[7]10644×10-7
      PIAD E-Beam[46]10641.27×10-6
      HfO2E-Beam [86]3552.8×10-4
      E-Beam[44]10649.3×10-7
      Nb2O5PIAD E-Beam[46]10646.05×10-6
      Al2O3IBS[31]6355×10-6
      Ta2O5IBS[7]10644.5×10-7
      a-SiIBS[37]15501.2×10-5
      TiO2IAD E-Beam[46]-10-5
      Ta2O5-TiO2IBS[47]1064, 155010-7--10-6
      Ta2O5-Nb2O5Co-IBS[87]15502.35×10-4
      Si3N4LPCVD[69]155010-5
      ZnSeResistive heating [35]10642.15×10-5
      YbF3Resistive heating[35]10648.1×10-6
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    Jiahui Wen, Meiping Zhu, Jian Sun, Jingping Li, Jianda Shao. Research Progress on Absorption Loss Control of Laser Coating[J]. Acta Optica Sinica, 2022, 42(7): 0700001

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    Paper Information

    Category: Reviews

    Received: Sep. 26, 2021

    Accepted: Nov. 3, 2021

    Published Online: Mar. 28, 2022

    The Author Email: Zhu Meiping (bree@siom.ac.cn)

    DOI:10.3788/AOS202242.0700001

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