Design of Multi-Point Real-Time Lithography Light Source Uniformity Detection System

Kewei Zhao; Aiying Tan; Shaoyun Yin; Wentao Cai; Ruofu Yang; Jianjun Chen; Shoufeng Tong

doi:10.3788/LOP55.061203

Laser & Optoelectronics Progress, Volume. 55, Issue 6, 061203(2018)

Design of Multi-Point Real-Time Lithography Light Source Uniformity Detection System

Kewei Zhao^{1,2、1; 2;}, Aiying Tan^2、2;, Shaoyun Yin^2、2;, Wentao Cai^2、2;, Ruofu Yang^{、2*; *;}, Jianjun Chen^2、2;, and Shoufeng Tong^1、1;

Author Affiliations

¹ Key Laboratory of Optoelectronic Measurement & Control and Optical Information Transfer Technology, Ministry of Education, Changchun University of Science and Technology, Changchun, Jilin 130022, China;

² Center of Integrated Optoelectronic Technology, Chongqing Institute of Green and Intelligent Technology, Chinese Academy of Sciences, Chongqing 400714, China

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Figures & Tables(11)

Fig. 1. System structure of the illuminance uniformity detection equipment

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Fig. 2. Picture of illuminance uniformity detection equipment

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Fig. 3. Improved current-voltage amplifying circuit

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Fig. 4. Positions of the detector units placed

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Fig. 5. Picture of exposure machine illumination uniformity test

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Fig. 6. Photoelectric characteristic calibration curve of detector unit

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Fig. 7. Calibration curves of photoelectric characteristic of the detector unit after correction

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Table 1. Repeatability of output voltage of detector units with the luminous power of 9.6 mW/cm2
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Table 1. Repeatability of output voltage of detector units with the luminous power of 9.6 mW/cm2
No. Output voltage /mV
Group 1 Group 2 Group 3 Group 4 Group 5
1 735 736 731 738 738
2 746 749 749 750 747
3 749 740 746 741 745
4 796 799 792 792 794
5 782 781 788 783 785

Table 2. Repeatability of output voltage of detector units with the luminous power of 12.5 mW/cm2
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Table 2. Repeatability of output voltage of detector units with the luminous power of 12.5 mW/cm2
No. Output voltage /mV
Group 1 Group 2 Group 3 Group 4 Group 5
1 895 893 893 896 891
2 917 918 919 916 918
3 915 919 919 919 912
4 970 968 974 973 971
5 953 951 956 954 953

Table 3. Repeatability of output voltage of detector units with the luminous power of 15.5 mW/cm2
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Table 3. Repeatability of output voltage of detector units with the luminous power of 15.5 mW/cm2
No. Output voltage /mV
Group 1 Group 2 Group 3 Group 4 Group 5
1 1075 1073 1073 1076 1071
2 1086 1088 1089 1086 1088
3 1085 1089 1089 1089 1082
4 1153 1158 1154 1153 1151
5 1133 1131 1136 1134 1133

Table 4. Accuracy of the detection system
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Table 4. Accuracy of the detection system
Group1 Group1 Group1 Group1 Group1
97.0% 97.0% 96.9% 97.0% 97.1%

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Kewei Zhao, Aiying Tan, Shaoyun Yin, Wentao Cai, Ruofu Yang, Jianjun Chen, Shoufeng Tong. Design of Multi-Point Real-Time Lithography Light Source Uniformity Detection System[J]. Laser & Optoelectronics Progress, 2018, 55(6): 061203

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Paper Information

Category: Instrumentation, Measurement and Metrology

Received: Nov. 16, 2017

Accepted: --

Published Online: Sep. 11, 2018

The Author Email: Ruofu Yang ( yangruofu@cigit.ac.cn)

DOI:10.3788/LOP55.061203

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology

Table 1. Repeatability of output voltage of detector units with the luminous power of 9.6 mW/cm2

Table 1. Repeatability of output voltage of detector units with the luminous power of 9.6 mW/cm2

Table 2. Repeatability of output voltage of detector units with the luminous power of 12.5 mW/cm2

Table 2. Repeatability of output voltage of detector units with the luminous power of 12.5 mW/cm2

Table 3. Repeatability of output voltage of detector units with the luminous power of 15.5 mW/cm2

Table 3. Repeatability of output voltage of detector units with the luminous power of 15.5 mW/cm2

Table 4. Accuracy of the detection system

Table 4. Accuracy of the detection system