Journal of Applied Optics, Volume. 46, Issue 4, 725(2025)
Design of non-contact micro defect detection system
Fig. 1. Structure diagram of non-contact detection system for micro defects
Fig. 3. Relationship between cone vertex angle of Powell prism and angle of outgoing beam
Fig. 4. Optical path trajectory of narrow beam incidence on Powell prism
Fig. 5. Position relationship diagram of array detector and receiving lens
Fig. 6. Structure diagram of non-contact detection system for micro defects
Fig. 8. Aluminum foil with defects in different locations and pore sizes
Fig. 9. Optical path tracing of non-contact detection system for micro defects
Fig. 10. Energy diagram of light spot received by linear array detector
Fig. 11. Position and intensity of transmitted light beam received by linear array detector
Fig. 12. Combination of two systems enables testing of larger samples
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Qingyan LI, Jiajie WU, Feiyue CHEN, Deyin GUO, Yijie GU, Hongyi XU. Design of non-contact micro defect detection system[J]. Journal of Applied Optics, 2025, 46(4): 725
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Received: Aug. 7, 2024
Accepted: --
Published Online: Sep. 16, 2025
The Author Email: Hongyi XU (许虹怡)