Journal of Applied Optics, Volume. 46, Issue 4, 725(2025)

Design of non-contact micro defect detection system

Qingyan LI1,2, Jiajie WU1,2, Feiyue CHEN1, Deyin GUO1, Yijie GU1, and Hongyi XU3、*
Author Affiliations
  • 1Huzhou Key Laboratory of Intelligent Optoelectronic High-End Equipment, Intelligent Optical Sensing and Control Center, Huzhou Institute of Zhejiang University, Huzhou 313000, China
  • 2School of Control Science and Engineering, Zhejiang University, Hangzhou 310000, China
  • 3Huzhou Key Laboratory of Intelligent Perception and Optimization Control of Industrial Systems, School of Engineering, Huzhou University, Huzhou 313000, China
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    Figures & Tables(12)
    Structure diagram of non-contact detection system for micro defects
    Schematic diagram of working principle of Powell prism
    Relationship between cone vertex angle of Powell prism and angle of outgoing beam
    Optical path trajectory of narrow beam incidence on Powell prism
    Position relationship diagram of array detector and receiving lens
    Structure diagram of non-contact detection system for micro defects
    Linear array laser beam received by linear array detector
    Aluminum foil with defects in different locations and pore sizes
    Optical path tracing of non-contact detection system for micro defects
    Energy diagram of light spot received by linear array detector
    Position and intensity of transmitted light beam received by linear array detector
    Combination of two systems enables testing of larger samples
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    Qingyan LI, Jiajie WU, Feiyue CHEN, Deyin GUO, Yijie GU, Hongyi XU. Design of non-contact micro defect detection system[J]. Journal of Applied Optics, 2025, 46(4): 725

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    Paper Information

    Category:

    Received: Aug. 7, 2024

    Accepted: --

    Published Online: Sep. 16, 2025

    The Author Email: Hongyi XU (许虹怡)

    DOI:10.5768/JAO202546.0401003

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