Fig. 1. Schematic diagram of femtosecond laser ablation. (a) Experimental setup; (b) laser scanning path

Fig. 2. Typical surface morphology of GH3230 after femtosecond laser ablation

Fig. 3. Fitted curves of ablation width and peak laser fluence at various scanning speeds

Fig. 4. Threshold incubation curve and absorption curve of GH3230. (a) Variation of NeFNe with equivalent pulse number Ne; (b) absorption curve of GH3230

Fig. 5. Cross-sectional images of ablated slits at different laser fluences and numbers of laser scannings

Fig. 6. Variation of ablation depth with laser fluence and the number of laser scanning

Fig. 7. Shape of focused laser beam and laser fluence distribution of ablation threshold at different laser fluences. (a) 1.27 J/cm²; (b) 2.54 J/cm²; (c) 3.81 J/cm²

Fig. 8. Variation of ablation rate with laser fluence and equivalent pulse number (N_e)

Fig. 9. Cross-sectional images of ablated slits at different laser scanning spacings and scanning layer numbers

Fig. 10. Variation of ablation depth and ablation rate with laser scanning spacing and scanning layer number. (a) Variation of ablation depth; (b) variation of ablation rate