Application of Three-Dimensional Phase Unwrapping Algorithm in Precision Motion Measurement

[in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]

Acta Optica Sinica, Volume. 27, Issue 1, 68(2007)

[in Chinese]^*, [in Chinese], [in Chinese], [in Chinese], and [in Chinese]

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References(5)

[1] [1] Dennis C. Ghiglia, Mark D. Pritt. Two-Dimensional Phase Unwrapping: Theory, Algorithms, and Software[M]. New York: John Wiley&Sons, Inc., 1998

[3] [3] Matthew R. Hart, Robert A. Conant, Kam Y. Lau et al.. Stroboscopic interferometer system for dynamic MEMS characterization[J]. J. Microelectromech. System, 2000, 9(4): 409～418

[5] [5] Christian Rembe, Richard S. Muller. Measurement system for full three-dimensional motion characterization of MEMS[J]. J. Microelectromech. System, 2002, 11(5): 479～488

[6] [6] K. Itoh. Analysis of the phase unwrapping algorithm[J]. Appl. Opt., 1982, 21(14): 2470～2473

[7] [7] William C. Tang, Tu-Cuong Nguyen, Michael W. Judy et al.. Eletrostatic-comb drive for lateral polysilicon resonators[J]. Sensors and Actuators A, 1990, A21～A23: 328～331

CLP Journals

[1] Sun Xuezhen, Su Xianyu, Zou Xiaoping. Phase-Unwrapping Based on Complementary Structured Light Binary Code[J]. Acta Optica Sinica, 2008, 28(10): 1947

[2] Zhang Ting, Lu Yuangang, Zhang Xuping. The Application of Tabu Search on Minimum Discontinuity Phase Unwrapping Algorithm[J]. Acta Optica Sinica, 2009, 29(8): 2169

[3] Zhang Qican, Su Xianyu. Research Progress of Dynamic Three-Dimensional Shape Measurement[J]. Laser & Optoelectronics Progress, 2013, 50(1): 10001

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[in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Application of Three-Dimensional Phase Unwrapping Algorithm in Precision Motion Measurement[J]. Acta Optica Sinica, 2007, 27(1): 68

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Paper Information

Category: Instrumentation, Measurement and Metrology

Received: Jan. 4, 2006

Accepted: --

Published Online: Jan. 22, 2007

The Author Email: (cghu@hotmail.com)

DOI:

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology