Journal of Synthetic Crystals, Volume. 54, Issue 3, 445(2025)
A Novel Suboxide Chemical Vapor Transport Technique for Cost-Effective Growth of β-Ga2O3 Thick Films
As an ultra-wide bandgap semiconductor material, β-Ga2O3 has a broad application prospect in power devices. This work proposes a new method for fast epitaxial growth of crystalline β-Ga2O3 thick films: the suboxide chemical vapor transport (SOCVT), which has the advantages of simple operation and cost-effective. Using gaseous Ga2O generated by the high-temperature reaction of liquid Ga and solid Ga2O3 as the Ga source, the growth of a β-Ga2O3 crystalline film, thicker than 100 μm, on the c-plane sapphire single-crystal substrate (1 cm×1 cm) was achieved in the CO2 atmosphere at a setting temperature of 1 300 ℃ with the crucible-substrate spacing of 8.5 cm. According to the XRD analyses, the sample has a preferred orientation of . The SEM characterizations show that the deposited thick film is uniform and dense, with a thickness of 106.4 μm. XPS analyses reveal that the element O/Ga ratio of the thick film is 1.5, indicating its high chemical purity with no carbon-doping. The bandgap estimated from optical transmission spectrum is 4.42 eV. The research results indicate that the SOCVT technique offers a fast growth rate of β-Ga2O3, which is expected to become a new method for cost-effective and fast growth of crystalline β-Ga2O3 thick films.
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CHEN Xuyang, LI Haobo, QIN Huayao, XU Mingyao, LU Yinmei, HE Yunbin. A Novel Suboxide Chemical Vapor Transport Technique for Cost-Effective Growth of β-Ga2O3 Thick Films[J]. Journal of Synthetic Crystals, 2025, 54(3): 445
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Received: Dec. 11, 2024
Accepted: Apr. 23, 2025
Published Online: Apr. 23, 2025
The Author Email: HE Yunbin (ybhe@hubu.edu.cn)