OPD Multiplicated New Laser Interferometer with Nanometric Accuracy

[in Chinese]; [in Chinese]; [in Chinese]

Chinese Journal of Lasers, Volume. 27, Issue 5, 431(2000)

[in Chinese], [in Chinese], and [in Chinese]

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References(2)

[1] [1] Shigeru Hosoe. Highly precise and stable laser displacement measurement interferometer with differential optical passes in practical use. Nanotechnology, 1993, 4:81～85

[2] [2] Matsumoto Hirokazu, Minoshima Kaoru. Recent research state and forecast of ultra-precision measuring technology. The Japan Society for Precision Engineering, 1993, 59(1):36～41

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[in Chinese], [in Chinese], [in Chinese]. OPD Multiplicated New Laser Interferometer with Nanometric Accuracy[J]. Chinese Journal of Lasers, 2000, 27(5): 431

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Paper Information

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Received: Dec. 21, 1998

Accepted: --

Published Online: Aug. 9, 2006

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Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology