Acta Optica Sinica, Volume. 35, Issue s1, 105001(2015)

Substrate Positioning Error Analysis and Compensation Method in Holographic Grating Fabrication

Dong Ningning1、*, Cui Jinjiang1, Xu Jiangen1, and Xu Jie1,2
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
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    References(5)

    [1] [1] E G Loewen, E Popov. Diffraction Gratings and Applications [M]. New York: Marcel Dekker Inc, 1997.

    [2] [2] E A Sokolova, V Kruizinga, D De Bruijn, et al.. Computer modeling of a wavefront diffracted at a concave grating [J]. J Opt Technol, 2003, 70(8): 600-606.

    [3] [3] Zhou Qian, Zeng Lijiang, Li Lifeng. Numerical simulation and experimental demonstration of error compensation between recording structure and use structure of flat-field holographic concave gratings [J]. Spectroscopy and Spectral Analysis, 2008, 28(7): 1674-1678.

    [4] [4] Li Wenhao. Study on the Plane Holographic Grating and Ⅳ-Type Concave Holographic Grating Design and Manufacture Technology of Holographic Grating [D]. Changchun: Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, 2008.

    [5] [5] Yang Houmin. A new method for accurate determining the grooves of the plane holographic grating (PHG) during manufacturing [J]. Optical Mechanical, 1989, (5): 1-6.

    CLP Journals

    [1] Jiang Haowei, Li Guangzhen, Liu Yian, Chen Yuping, Chen Xianfeng. Recent Advances in Cascading Electro-Optic Photonic Crystal[J]. Laser & Optoelectronics Progress, 2017, 54(6): 60001

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    Dong Ningning, Cui Jinjiang, Xu Jiangen, Xu Jie. Substrate Positioning Error Analysis and Compensation Method in Holographic Grating Fabrication[J]. Acta Optica Sinica, 2015, 35(s1): 105001

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    Paper Information

    Category: Diffraction and Gratings

    Received: Jan. 13, 2015

    Accepted: --

    Published Online: Jul. 27, 2015

    The Author Email: Ningning Dong (dongnn@sibet.ac.cn)

    DOI:10.3788/aos201535.s105001

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