Suspended nanomembrane silicon photonic integrated circuits

Rongxiang Guo; Qiyue Lang; Zunyue Zhang; Haofeng Hu; Tiegen Liu; Jiaqi Wang; Zhenzhou Cheng

doi:10.1016/j.chip.2024.100104

Chip, Volume. 3, Issue 3, 100104(2024)

Suspended nanomembrane silicon photonic integrated circuits

Rongxiang Guo^1,2、†, Qiyue Lang^1,2、†, Zunyue Zhang^1,2、†, Haofeng Hu^1,2, Tiegen Liu^1,2, Jiaqi Wang^3、*, and Zhenzhou Cheng^{1,2,4,5,6、**}

Author Affiliations

¹School of Precision Instrument and Opto-electronics Engineering, Tianjin University, Tianjin 300072, China

²Key Laboratory of Opto-electronic Information Technology, Ministry of Education, Tianjin 300072, China

³College of Physics and Optoelectronic Engineering, Shenzhen University, Shenzhen 518060, China

⁴Georgia Tech-Shenzhen Institute, Tianjin University, Shenzhen 518055, China

⁵Department of Chemistry, The University of Tokyo, Tokyo 113-0033, Japan

⁶School of Physics and Electronic Engineering, Xinjiang Normal University, Urumqi 830054, China

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Rongxiang Guo, Qiyue Lang, Zunyue Zhang, Haofeng Hu, Tiegen Liu, Jiaqi Wang, Zhenzhou Cheng. Suspended nanomembrane silicon photonic integrated circuits[J]. Chip, 2024, 3(3): 100104

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Paper Information

Category: Research Articles

Received: Mar. 26, 2024

Accepted: Jul. 1, 2024

Published Online: Nov. 12, 2024

The Author Email: Wang Jiaqi (jqwang@szu.edu.cn), Cheng Zhenzhou (zhenzhoucheng@tju.edu.cn)

DOI:10.1016/j.chip.2024.100104

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