Chip, Volume. 3, Issue 3, 100104(2024)

Suspended nanomembrane silicon photonic integrated circuits

Rongxiang Guo1,2、†, Qiyue Lang1,2、†, Zunyue Zhang1,2、†, Haofeng Hu1,2, Tiegen Liu1,2, Jiaqi Wang3、*, and Zhenzhou Cheng1,2,4,5,6、**
Author Affiliations
  • 1School of Precision Instrument and Opto-electronics Engineering, Tianjin University, Tianjin 300072, China
  • 2Key Laboratory of Opto-electronic Information Technology, Ministry of Education, Tianjin 300072, China
  • 3College of Physics and Optoelectronic Engineering, Shenzhen University, Shenzhen 518060, China
  • 4Georgia Tech-Shenzhen Institute, Tianjin University, Shenzhen 518055, China
  • 5Department of Chemistry, The University of Tokyo, Tokyo 113-0033, Japan
  • 6School of Physics and Electronic Engineering, Xinjiang Normal University, Urumqi 830054, China
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    Leveraging the low linear and nonlinear absorption loss of silicon at mid-infrared (mid-IR) wavelengths, silicon photonic integrated circuits (PICs) have attracted significant attention for mid-IR applications including optical sensing, spectroscopy, and nonlinear optics. However, mid-IR silicon PICs typically show moderate performance compared to state-of-the-art silicon photonic devices operating in the telecommunication band. Here, we proposed and demonstrated suspended nanomembrane silicon (SNS) PICs with light-guiding within deep-subwavelength waveguide thickness for operation in the short-wavelength mid-IR region. We demonstrated key building components, namely, grating couplers, waveguide arrays, micro-resonators, etc., which exhibit excellent performances in bandwidths, back reflections, quality factors, and fabrication tolerance. Moreover, the results show that the proposed SNS PICs have high compatibility with the multi-project wafer foundry services. Our study provides an unprecedented platform for mid-IR integrated photonics and applications.

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    Rongxiang Guo, Qiyue Lang, Zunyue Zhang, Haofeng Hu, Tiegen Liu, Jiaqi Wang, Zhenzhou Cheng. Suspended nanomembrane silicon photonic integrated circuits[J]. Chip, 2024, 3(3): 100104

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    Paper Information

    Category: Research Articles

    Received: Mar. 26, 2024

    Accepted: Jul. 1, 2024

    Published Online: Nov. 12, 2024

    The Author Email: Wang Jiaqi (jqwang@szu.edu.cn), Cheng Zhenzhou (zhenzhoucheng@tju.edu.cn)

    DOI:10.1016/j.chip.2024.100104

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