Sensing Characteristics with High Figure-of-Merit Based on MoS<sub>2</sub> Thin Film Coupled Waveguide

Ying Chen; Jiankun Wang; Zhixin Ding; Meijie Li; Meng Zhao; Guoting Zhao

doi:10.3788/CJL230821

Chinese Journal of Lasers, Volume. 51, Issue 2, 0213002(2024)

Sensing Characteristics with High Figure-of-Merit Based on MoS₂ Thin Film Coupled Waveguide

Ying Chen, Jiankun Wang, Zhixin Ding^*, Meijie Li, Meng Zhao, and Guoting Zhao

Hebei Province Key Laboratory of Test/Measurement Technology and Instrument, School of Electrical Engineering, Yanshan University, Qinhuangdao 066004, Hebei, China

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Figures & Tables(13)

Fig. 1. Schematic diagram of composite structure model

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Fig. 2. Spectral response curves of PWG1, PWG2 and the overall structure. (a) Spectral response curve of the structure in the presence of PWG1 only; (b) spectral response curve of the structure in the presence of PWG2 only; (c) spectral response curve of the whole structure in the presence of both waveguides

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Fig. 3. Internal electromagnetic field distributions of PWG1, PWG2 and the overall structure. (a) Electromagnetic field distribution of PWG1 at $θ = 43.07 °$ ; (b) electromagnetic field distribution of PWG2 at $θ = 40.42 °$ ; (c) electromagnetic field distribution of the whole structure at $θ = 40.4 °$ ; (d) electromagnetic field distribution of PWG1 at $θ = 40.42 °$

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Fig. 4. Influence of d₂ and d₄ on spectral curve. (a) Influence of d₂ on resonance Ⅱ; (b) influence of d₂ on resonance depth; (c) influence of d₄ on resonance FRⅠ

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Fig. 5. Influence of $d_{1}$ and $d_{3}$ and on Fano characteristics. (a) Influence of $d_{1}$ on spectral curve; (b) influence of $d_{3}$ on FRⅠ; (c) influence of $d_{3}$ on FOM value

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Fig. 6. Influence of MoS₂ layer n on Fano characteristics. (a) Influence of n on spectral curve; (b) influence of n on FRⅠ; (c) influence of n on FOM value

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Fig. 7. GWO-DELM model flowchart

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Fig. 8. Comparison chart of real and predicted FOM values and iterative optimization comparison chart. (a) Comparison between the real value and the predicted value; (b) iterative optimization comparison chart

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Fig. 9. Residual histogram and fitting curve of each optimization algorithm

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Fig. 10. Spectral response before and after structural parameters optimization and sensing performance analysis. (a) Spectral response before and after structural parameters optimization; (b) influence of n_s on Fano resonance curve; (c) fitting curve between $n_{s}$ and resonance angle $θ$

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Table 1. Sensing property comparison of the sensors prepared with MoS₂ and graphene
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Table 1. Sensing property comparison of the sensors prepared with MoS₂ and graphene
Material FOM
MoS₂ 1.2×10⁴
Graphene 7×10³

Table 2. Error comparison of different optimization algorithms
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Table 2. Error comparison of different optimization algorithms
Optimization algorithm $X_{M A E}$ $X_{R M S E}$ $X_{M A P E}$ /%
CS-DELM 2.3148 3.4836 10.3849
BA-DELM 1.9837 2.3799 7.4655
WOA-DELM 1.2597 2.1327 7.1958
GWO-DELM 0.9836 0.9937 2.9837

Table 3. Sensing property comparison between the designed and similar structures

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Table 3. Sensing property comparison between the designed and similar structures

Structure	Number of Fano peaks	FOM	Ref.
Waveguide-coupled surface plasmon resonance sensor structure	One	37.6	［5］
Double waveguides with graphene	One	9340	［6］
MIM waveguide with H-type cavity	One	1259.2	［22］
Photonic crystal slot nanobeam cavity	One	553	［23］
Square-cavity-coupled straight waveguide	Two	5542	［24］
This work	One	50000

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Ying Chen, Jiankun Wang, Zhixin Ding, Meijie Li, Meng Zhao, Guoting Zhao. Sensing Characteristics with High Figure-of-Merit Based on MoS₂ Thin Film Coupled Waveguide[J]. Chinese Journal of Lasers, 2024, 51(2): 0213002

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Paper Information

Category: micro and nano optics

Received: May. 10, 2023

Accepted: Jun. 15, 2023

Published Online: Jan. 4, 2024

The Author Email: Ding Zhixin (863163322@qq.com)

DOI:10.3788/CJL230821

CSTR:32183.14.CJL230821

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology

Table 1. Sensing property comparison of the sensors prepared with MoS2 and graphene

Table 1. Sensing property comparison of the sensors prepared with MoS2 and graphene

Table 2. Error comparison of different optimization algorithms

Table 2. Error comparison of different optimization algorithms

Table 3. Sensing property comparison between the designed and similar structures

Table 3. Sensing property comparison between the designed and similar structures

Table 1. Sensing property comparison of the sensors prepared with MoS₂ and graphene

Table 1. Sensing property comparison of the sensors prepared with MoS₂ and graphene