All‑Dielectric Metasurface Dual‑Parameter Sensor Based on Fano Resonance

Xueying Nan; Huigang Liu; Haitao Liu

doi:10.3788/CJL230854

Chinese Journal of Lasers, Volume. 51, Issue 2, 0210002(2024)

All‑Dielectric Metasurface Dual‑Parameter Sensor Based on Fano Resonance

Xueying Nan^1,2, Huigang Liu^1,2、*, and Haitao Liu^3,4、**

¹Engineering Research Center of Thin Film Optoelectronics Technology, Ministry of Education, College of Electronic Information and Optical Engineering, Nankai University, Tianjin 300350, China

²Department of Microelectronic Engineering, College of Electronic Information and Optical Engineering, Nankai University, Tianjin 300350, China

³Institute of Modern Optics, College of Electronic Information and Optical Engineering, Nankai University, Tianjin 300350, China

⁴Tianjin Key Laboratory of Micro-scale Optical Information Science and Technology, Tianjin 300350, China

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Figures & Tables(12)

$Structural diagram of “θ”-shape refractive index and temperature dual-parameter sensor. (a) Overall diagram of metasurface; (b) schematic of metasurface period; (c) top view of metasurface period$

Fig. 1. Structural diagram of “θ”-shape refractive index and temperature dual-parameter sensor. (a) Overall diagram of metasurface; (b) schematic of metasurface period; (c) top view of metasurface period

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Fig. 2. Comparison of transmission spectrum of metasurface with (solid line) and without (dotted line) asymmetric air hole

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Fig. 3. Q versus 1/d²

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Fig. 4. Transmissivity curves of metasurface structures. (a) r=50 nm; (b) r=60 nm; (c) r=70 nm

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Fig. 5. Electromagnetic field distributions at resonant wavelengths. (a) λ=1036.5 nm, z=t/2; (b) λ=1155.8 nm, z=t/2; (c) λ=1036.5 nm, z=t/2; (d) λ=1155.8 nm, x=0

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Fig. 6. Transmissivity curves under different n. (a) Dip 1; (b) dip 2

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$Linear fitting of resonance wavelength as a function of refractive index for dip 1 and dip 2 when n changes from 1.33 to 1.40. (a) Dip 1; (b) dip 2$

Fig. 7. Linear fitting of resonance wavelength as a function of refractive index for dip 1 and dip 2 when n changes from 1.33 to 1.40. (a) Dip 1; (b) dip 2

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Fig. 8. Transmissivity curves under different temperatures. (a) Dip 1; (b) dip 2

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Fig. 9. Linear fitting of resonant wavelength as a function of temperature. (a) Dip 1; (b) dip 2

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Fig. 10. Resonance wavelength versus absolute error of structure size

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Table 1. Comparison among matrix-theory prediction results ( $Δ n_{c a l}$ and $Δ T_{c a l}$ ) and preset values ( $Δ n_{s e t}$ and $Δ T_{s e t}$ ) for refractive index and temperature dual-parameter sensing

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Table 1. Comparison among matrix-theory prediction results ( $Δ n_{c a l}$ and $Δ T_{c a l}$ ) and preset values ( $Δ n_{s e t}$ and $Δ T_{s e t}$ ) for refractive index and temperature dual-parameter sensing

$Δ n_{s e t}$	$Δ T_{s e t}$ /℃	$Δ λ_{1}$ /nm	$Δ λ_{2}$ /nm	$Δ n_{c a l}$	$Δ T_{c a l}$ /℃	$δ_{n}$ /%	$δ_{T}$ /%
0.02	20	5.83	5.35	0.0196	19.98	-2.00	-1.00
0.02	40	6.36	6.32	0.0201	39.605	0.50	-0.99
0.04	20	11.68	10.15	0.0406	19.08	1.50	-4.60
0.04	60	12.44	11.84	0.0407	58.25	1.75	-2.90
0.05	60	14.96	13.96	0.0496	59.79	-0.80	-0.35
0.07	40	20.28	17.76	0.0701	38.154	0.14	-4.60

Table 2. Comparison of sensing performance of different metasurface structures

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Table 2. Comparison of sensing performance of different metasurface structures

Structure	Material	λ₀ /nm	S /（nm·RIU^-1）	Q	FOM	Reference
V-shape	TiO₂	909.88 921.36	186.96	5126	721	［7］
Two asymmetric rectangular hollows	Si	1124 1256	160.0	8428	575*	［10］
Complementary split-ring resonator metasurface	Si	1545 1610	155.0	3.86×10⁶		［11］
Au nanoparticle array	Au	856 1090	250.0	121		［20］
Silicon-notched disk	Si	1219.95 1311.70 1527.55	400.36	1252.3	292.23*	［12］
Si rectangular column	Si	1591 1651	419.45	3408	542.8	［21］
Our structure （“θ” shaped Si disc array）	Si	1036 1159	278.9	9735	9387	This work

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Xueying Nan, Huigang Liu, Haitao Liu. All‑Dielectric Metasurface Dual‑Parameter Sensor Based on Fano Resonance[J]. Chinese Journal of Lasers, 2024, 51(2): 0210002

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Paper Information

Category: remote sensing and sensor

Received: May. 23, 2023

Accepted: Jun. 25, 2023

Published Online: Jan. 8, 2024

The Author Email: Liu Huigang (liuhg@nankai.edu.cn), Liu Haitao (liuht@nankai.edu.cn)

DOI:10.3788/CJL230854

CSTR:32183.14.CJL230854

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology

Table 1. Comparison among matrix-theory prediction results (Δncal and ΔTcal) and preset values (Δnset and ΔTset) for refractive index and temperature dual-parameter sensing

Table 1. Comparison among matrix-theory prediction results (Δncal and ΔTcal) and preset values (Δnset and ΔTset) for refractive index and temperature dual-parameter sensing

Table 2. Comparison of sensing performance of different metasurface structures

Table 2. Comparison of sensing performance of different metasurface structures

Table 1. Comparison among matrix-theory prediction results ( $Δ n_{c a l}$ and $Δ T_{c a l}$ ) and preset values ( $Δ n_{s e t}$ and $Δ T_{s e t}$ ) for refractive index and temperature dual-parameter sensing

Table 1. Comparison among matrix-theory prediction results ( $Δ n_{c a l}$ and $Δ T_{c a l}$ ) and preset values ( $Δ n_{s e t}$ and $Δ T_{s e t}$ ) for refractive index and temperature dual-parameter sensing