Fig. 1. Schematic of membrane layer structure

Fig. 2. Reflectance spectral curves

Fig. 3. Phase difference curve

Fig. 4. Layer sensitivity

Fig. 5. Effect of thick film thickness on phase difference

Fig. 6. Reflectance spectral curve

Fig. 7. SEM measurement image

Fig. 8. Phase difference curve

Fig. 9. Reflective surface curve

Fig. 10. RMS before and after SiO₂ deposition

Fig. 11. RMS The amount of RMS changes before and after SiO₂ deposition

Fig. 12. Linear fit curve

Fig. 13. Reflective surface profile after deposition of 4 805 nm SiO₂