Fig. 1. Line-array spectral confocal measurement system

Fig. 2. Line-array point source

Fig. 3. Structure of area detection spectrometer

Fig. 4. Physical image of dispersive objective lens

Fig. 5. Variations of peak light intensity image at different axial positions. (a) Initial position image; (b) first moved image; (c) second moved image; (d) final position image

Fig. 6. Schematic diagrams of imaging. (a) Initial calibration image; (b) final calibration image

Fig. 7. Virtual grid arrangement

Fig. 8. Axial position distribution of system wavelengths

Fig. 9. Image of line-array spectral confocal measurement system

Fig. 10. Linear fitting result

Fig. 11. Results of repeatability measurement experiments

Fig. 12. Physical diagrams of steps with different height differences. (a) 30 μm; (b) 80 μm; (c) 120 μm; (d) 150 μm

Fig. 13. Step measurement process

Fig. 14. Schematic diagram of surface topography of step

Fig. 15. Three-dimensional topography reconstruction result of step surface