Acta Optica Sinica, Volume. 29, Issue 6, 1734(2009)
Evolution of Growth Stress of HfO2 Thin Film
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Fang Ming, Shao Shuying, Shen Xuefeng, Fan Zhengxiu, Shao Jianda. Evolution of Growth Stress of HfO2 Thin Film[J]. Acta Optica Sinica, 2009, 29(6): 1734
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