Development of Fiber-Optic Acoustic Sensors with Silicon-Based MEMS Wheel-Shaped Diaphragm for Mini-Unmanned Aerial Vehicle Detection

Kangning Ji; Xinyu Hu; Linsen Xiong; Haibo Wang; Zhimei Qi

doi:10.3788/AOS231721

Acta Optica Sinica, Volume. 44, Issue 7, 0728002(2024)

Development of Fiber-Optic Acoustic Sensors with Silicon-Based MEMS Wheel-Shaped Diaphragm for Mini-Unmanned Aerial Vehicle Detection

Kangning Ji^1,2, Xinyu Hu^1,2, Linsen Xiong^1,2, Haibo Wang^1,2, and Zhimei Qi^1,2,3、*

Author Affiliations

¹State Key Laboratory of Transducer Technology, Aerospace Information Research Institute, Chinese Academy of Sciences, Beijing 100190, China

²School of Electronic, Electrical and Communication Engineering, University of Chinese Academy of Sciences, Beijing 100049, China

³College of Materials Science and Opto-Electronic Technology, University of Chinese Academy of Sciences, Beijing 100049, China

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Kangning Ji, Xinyu Hu, Linsen Xiong, Haibo Wang, Zhimei Qi. Development of Fiber-Optic Acoustic Sensors with Silicon-Based MEMS Wheel-Shaped Diaphragm for Mini-Unmanned Aerial Vehicle Detection[J]. Acta Optica Sinica, 2024, 44(7): 0728002

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Paper Information

Category: Remote Sensing and Sensors

Received: Oct. 31, 2023

Accepted: Dec. 13, 2023

Published Online: Apr. 18, 2024

The Author Email: Qi Zhimei (zhimei-qi@mail.ie.ac.cn)

DOI:10.3788/AOS231721

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