Acta Optica Sinica, Volume. 45, Issue 11, 1123004(2025)

Optical Interference Regulation Based on DMD Composite Electrodes and Design and Fabrication of All-Solid-State Multicolor Electrochromic Devices

Jiankang Guo1,2, Hanxiang Jia2,3, Qian Gao1、**, and Xun Cao2,3、*
Author Affiliations
  • 1Key Laboratory of Automobile Materials of Ministry of Education, School of Materials Science and Engineering, Jilin University, Changchun 130025, Jilin , China
  • 2State Key Laboratory of High Performance Ceramics and Superfine Microstructure, Shanghai Institute of Ceramics, Chinese Academy of Sciences, Shanghai 200050, China
  • 3Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China
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    Figures & Tables(8)
    Reflection spectra of samples with structure of glass/ITO-1/Ag/ITO-2/WO3 before and after ion implantation for different thicknesses of ITO-2. (a) Before ion implantation; (b) after ion implantation
    Reflection spectra of metal films M (Au, Ag, and Cu respectively) for different thicknesses of ITO-2 layer
    Comparison of reflection spectra before and after samples with different metal films M and different thicknesses of ITO-2 layer when thickness of WO₃ layer is 250 nm. (a) Au; (b) Ag; (c) Cu
    Comparison of reflection spectra before and after samples with different metal films M and different thicknesses of ITO-2 layer when thickness of WO₃ layer is 400 nm. (a) Au; (b) Ag; (c) Cu
    Contour plots of R value of IAI structure varying with thicknesses of the bottom and top ITO layers when thickness of Ag is fixed at 5, 10, 15, and 20 nm. (a) 5 nm; (b) 10 nm; (c) 15 nm; (d) 20 nm
    Digital photos and test characterizations of DMD all-solid-state ECDs. (a) Digital photos of seven different colored DMD all-solid-state ECDs; (b) cross-sectional SEM image of red device; (c) SEM image of surface of WO3 layer of red device; (d) cross-sectional EDS analysis results of red device
    Diagram of structure and variations of reflection spectra of DMD all-solid-state ECDs. (a) Diagram of structure of DMD all-solid-state ECDs; (b) variations of reflection spectra of red DMD all-solid-state ECDs
    • Table 1. Sputtering parameters of DMD composite electrode and WO₃ electrochromic layer

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      Table 1. Sputtering parameters of DMD composite electrode and WO₃ electrochromic layer

      FilmTargetSputtering methodPressure /PaVolume fraction ratio of Ar to O2Power /WSputtering rate /(s·nm-1
      WO3WDC2.094∶6709
      ITOITORF0.380∶0908
      AgAgDC0.360∶0503
      CuCuDC0.360∶0505
      AuAuDC0.360∶0507
      LiTaO3LiTaO3RF1.048∶220080
      NiOxNiDC1.040∶1010030
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    Jiankang Guo, Hanxiang Jia, Qian Gao, Xun Cao. Optical Interference Regulation Based on DMD Composite Electrodes and Design and Fabrication of All-Solid-State Multicolor Electrochromic Devices[J]. Acta Optica Sinica, 2025, 45(11): 1123004

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    Paper Information

    Category: Optical Devices

    Received: Mar. 26, 2025

    Accepted: Apr. 21, 2025

    Published Online: Jun. 23, 2025

    The Author Email: Qian Gao (gaoqian@jiu.edu.cn), Xun Cao (cxun@mail.sic.ac.cn)

    DOI:10.3788/AOS250797

    CSTR:32393.14.AOS250797

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