Acta Optica Sinica, Volume. 17, Issue 5, 585(1997)
Study of Plano-Convex Silicon Nitride Microlenses with Spherical Surface
References(4)
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[4] [4] Kubo M, Hanabusa M. Fabrication of microlenses by laser chemical vapor deposition. Appl. Opt., 1990, 29(18): 2755～2759
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[in Chinese], [in Chinese]. Study of Plano-Convex Silicon Nitride Microlenses with Spherical Surface[J]. Acta Optica Sinica, 1997, 17(5): 585
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