Piezoelectrics & Acoustooptics, Volume. 45, Issue 5, 723(2023)
Sensitivity Optimization Method of MEMS Accelerometer Based on Antisymmetric Mode drive
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LIU Chen, WU Huanchen, HONG Yifei, WANG Faguang, LI Lei. Sensitivity Optimization Method of MEMS Accelerometer Based on Antisymmetric Mode drive[J]. Piezoelectrics & Acoustooptics, 2023, 45(5): 723
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Received: Jul. 13, 2023
Accepted: --
Published Online: Jan. 6, 2024
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