Piezoelectrics & Acoustooptics, Volume. 45, Issue 5, 723(2023)
Sensitivity Optimization Method of MEMS Accelerometer Based on Antisymmetric Mode drive
In order to facilitate the driving of the antisymmetric mode of the resonant beam and improve the sensitivity of acceleration detection, a distributed electrode driving method is proposed in this paper. The distributed electrode can drive the antisymmetric mode of the resonant beam and detect the signal more easily. The elastic beam mass block system is designed to be used as the sensitive mass for sensing external acceleration, and the resonant beam is used as the sensitive element for measuring acceleration. The first two order dynamics equations of the resonant beam are established. The first and second order frequencies of the resonant beam are measured under different accelerations. The experimental results show that the positive sensitivity of the second order mode detection is increased by 49% and the negative sensitivity is increased by 89%, and the quality factor of the second order mode detection is 3.19 times that of the first order mode. Finally, the influence of bias DC voltage on sensitivity is analyzed. With the increase of voltage, the sensitivity of positive acceleration detection increases, while the sensitivity of negative acceleration detection decreases.
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LIU Chen, WU Huanchen, HONG Yifei, WANG Faguang, LI Lei. Sensitivity Optimization Method of MEMS Accelerometer Based on Antisymmetric Mode drive[J]. Piezoelectrics & Acoustooptics, 2023, 45(5): 723
Received: Jul. 13, 2023
Accepted: --
Published Online: Jan. 6, 2024
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