Stability of Surface-Modified Porous Silica Antireflective Coating

Huai Xiong; Yongxing Tang; Lili Hu; Bin Shen; Haiyuan Li

doi:10.3788/AOS201939.0831001

Acta Optica Sinica, Volume. 39, Issue 8, 0831001(2019)

Stability of Surface-Modified Porous Silica Antireflective Coating

Huai Xiong^1,2、*, Yongxing Tang^1,2, Lili Hu^2,3, Bin Shen¹, and Haiyuan Li¹

¹ Key Laboratory of High Power Laser and Physics, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China

² Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China

³ Research and Development Center of High Power Laser Components, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China

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Figures & Tables(8)

$Refractive indices of AR coatings before and after surface modification$

Fig. 1. Refractive indices of AR coatings before and after surface modification

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Fig. 2. Peak transmittances of AR coatings before and after surface modification

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Fig. 3. Transmittance spectra of AR-M6.5 composite coating before and after surface modification, and corresponding water contact angle test result of AR-M6.5 coating is given in inset

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Fig. 4. Transmittance spectrum of AR+NH3/HMDS coating

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Fig. 5. AFM images of coating surfaces before and after surface modification. (a) AR coating; (b) AR-M5 coating; (c) AR-M6.5 coating; (d) AR-M10 coating; (e) AR-2M10 coating

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Fig. 6. Morphologies of coating surfaces. (a) AR-M6.5 coating before surface modification; (b) AR-M6.5 coating after surface modification; (c) AR+NH3/HMDS coating before chemical atmosphere treatment; (d) AR+NH3/HMDS coating after chemical atmosphere treatment

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Fig. 7. Influence of relative humidity on peak transmittance

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Table 1. Water contact angle of modified coatings
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Table 1. Water contact angle of modified coatings
Film AR AR+NH₃/HMDS AM-M6.5
Contact angle /(°) 0 d 120.3 123.9 123.6
8 d (95%RH) 47.5 120.4 121.3
17 months (95%RH) 17.3 56.6 70.3

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Huai Xiong, Yongxing Tang, Lili Hu, Bin Shen, Haiyuan Li. Stability of Surface-Modified Porous Silica Antireflective Coating[J]. Acta Optica Sinica, 2019, 39(8): 0831001

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