Acta Optica Sinica, Volume. 8, Issue 3, 228(1988)
Method of improving accuracy of rotating analyzer ellipsometer
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ZHANG KEQI, TAN YIXUN. Method of improving accuracy of rotating analyzer ellipsometer[J]. Acta Optica Sinica, 1988, 8(3): 228
Paper Information
Category: Optical Design and Fabrication
Received: May. 11, 1987
Accepted: --
Published Online: Sep. 16, 2011
The Author Email:
CSTR:32186.14.
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