Chinese Journal of Lasers, Volume. 8, Issue 2, 17(1981)

A UV-preionized ArF and KrF excimer laser

Shang Guancheng, Yuan Cailai, Ye Chao, and Dou Airong
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  • [in Chinese]
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    References(5)

    [1] [1] R. Burnham, N. Djeu; Appl. Phys. Lett; 1976, 29, 707.

    [2] [2] Eobert C. Sze, Thomas R. Loree; IEEE J. Quant. Electr., 1978, QE-14, 944.

    [3] [3] T. J. Mokee et al.; IEEE, J. Quant. Electr., 1979, QE-15, 33.

    [5] [5] Τ. Y. Chang; Rev. Scient. Instrum., 1973, 44,405.

    [6] [6] J. N. Hoffman et al., Appl. Phys. Lett., 1976, 28, 538.

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    Shang Guancheng, Yuan Cailai, Ye Chao, Dou Airong. A UV-preionized ArF and KrF excimer laser[J]. Chinese Journal of Lasers, 1981, 8(2): 17

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    Paper Information

    Category: laser devices and laser physics

    Received: Mar. 26, 1980

    Accepted: --

    Published Online: Aug. 17, 2012

    The Author Email:

    DOI:

    CSTR:32186.14.

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