Chinese Journal of Lasers, Volume. 8, Issue 2, 17(1981)
A UV-preionized ArF and KrF excimer laser
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Shang Guancheng, Yuan Cailai, Ye Chao, Dou Airong. A UV-preionized ArF and KrF excimer laser[J]. Chinese Journal of Lasers, 1981, 8(2): 17
Category: laser devices and laser physics
Received: Mar. 26, 1980
Accepted: --
Published Online: Aug. 17, 2012
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CSTR:32186.14.