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Chinese Journal of Lasers, Volume. 8, Issue 2, 17(1981)

A UV-preionized ArF and KrF excimer laser

Shang Guancheng, Yuan Cailai, Ye Chao, and Dou Airong
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    UV-preionzed ArF and KrF excimer lasers are reported. Maximum pulse energies of 105 mJ in ArF and 185 mJ in KrF were extracted. In this paper we discuss the effect of various parameters on laser performances.

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    Shang Guancheng, Yuan Cailai, Ye Chao, Dou Airong. A UV-preionized ArF and KrF excimer laser[J]. Chinese Journal of Lasers, 1981, 8(2): 17

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    Paper Information

    Category: laser devices and laser physics

    Received: Mar. 26, 1980

    Accepted: --

    Published Online: Aug. 17, 2012

    The Author Email:

    DOI:

    CSTR:32186.14.

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology