Fig. 1. Principle diagram of super-resolution terahertz wave spectrometer

Fig. 2. Intensity response of GaN array detector to focusing spot

Fig. 3. Interference intensity distributions of terahertz waves with frequencies of 504 GHz and 600 GHz detected by spectrometer

Fig. 4. Spectra of terahertz waves with frequencies of 504 GHz and 600 GHz obtained by spectrometer

Fig. 5. Measurement results of terahertz waves with frequencies of 599.899 GHz and 600 GHz by single pixel system and array detector

Fig. 6. Spectra of terahertz sources with different frequencies

Fig. 7. Comparison between spectral measurement results and standard values