Fig. 1. Structural diagram. (a) PS-HCMR and tapered fiber coupling unit; (b) cross section of coupling unit

Fig. 2. Light field distribution diagrams and temperature sensitivity fitting diagram of PS-HCMR with different wall thicknesses obtained by finite element algorithm simulation. (a) d=2 µm; (b) d=4 µm; (c) d=6 µm; (d) d=8 µm; (e) d=10 µm; (f) temperature sensitivity versus wall thickness

Fig. 3. Prepared HCMR and its performance test results. (a) Physical HCMR drawing; (b) cross section of coupling area; (c) experimentally measured HCMR WGM resonance spectrum; (d) Lorentz fitting result

Fig. 4. Physical PS-HCMR drawings and their corresponding WGM spectral curves

Fig. 5. Prepared PS-SCMR and its performance test result. (a) Microscopic image before SCMR coating; (b) microscopic image after SCMR coating; (c) performance test result

Fig. 6. Optical path diagram of temperature sensing system

Fig. 7. Stability measurement result of PS-HCMR

Fig. 8. Temperature sensing characteristics measured by experiments. (a) WGM resonance spectra of pure SiO₂ HCMR; (b) WGM resonance spectra of PS-SCMR when thickness of PDMS is 50 µm; (c) WGM resonance spectra of PS-HCMR when thickness of PDMS is 50 µm; (d) wavelength drift of WGM resonance spectrum versus temperature

Fig. 9. Temperature sensing experimental test results of PS-HCMR