Chinese Journal of Lasers, Volume. 35, Issue 11, 1821(2008)

Fabrication of Microchip with Embedded Optical Fibers by Excimer Laser Processing Technique

Jin Yonglong*, Zhang Yu, and Gu Ning
Author Affiliations
  • [in Chinese]
  • show less
    References(14)

    [1] [1] S. Gawad, L. Schild, Ph. Renaud. Micromachined impedance spectroscopy flow cytometer for cell analysis and particle sizing [J]. Lab on a Chip, 2001, 1(1):76~82

    [2] [2] J. Enger, M. Goksr, K. Ramser et al.. Optical tweezers applied to a microfluidic system [J]. Lab on a Chip, 2004, 4(3):196~200

    [3] [3] Chen-Chen Lin, Angela Chen, Che-Hsin Lin. Microfluidic cell counter/sorter utilizing multiple particle tracing technique and optically switching approach [J]. Biomed. Microdevices, 2008, 10(1):55~63

    [4] [4] Jianhua Qin, Nannan Ye, Xin Liu et al.. Microfluidic devices for the analysis of apoptosis [J]. Electrophoresis, 2005, 26(19):3780~3788

    [5] [5] Che-Hsin Lin, Gwo-Bin Lee. Micromachined flow cytometers with embedded etched optic fibers for optical detection [J]. J. Micromech. Microeng., 2003, 13(3):447~453

    [6] [6] Luo Yi, Lou Zhifeng, Chu Denan et al.. Fabrication of glass microfluidic chip [J]. Nanotechnology and Precision Engineering, 2004, 2(1):20~23

    [7] [7] Anne Y. Fu, Hou-Pu Chou, Charles Spence et al.. An integrated microfabricated cell sorter [J]. Anal. Chem., 2002, 74(11):2451~2457

    [8] [8] Chen Tao, Yao Liying, Qi Heng et al.. Some key problems in PMMA based PCR microfluidic biochip by excimer laser micromachining [J]. Chinese J. Lasers, 2007, 34(Suppl.):146~150

    [9] [9] Zhang Lin, Lou Qihong, Wei Yunrong et al.. Comparison of etching characteristics of polymers by 193 nm and 308 nm excimer laser radiation [J]. Chinese J. Lasers, 2002, A29(1):25~28

    [10] [10] T. Berden, M. Sommer, E. W. Kreutz et al.. Excimer laser machining of a polymer multilayer for optoelectronics [C]. Lasers and Electro-Optics Society, IEEE, 1999, 2:691~692

    [11] [11] Z. Wang, J. El-Ali, M. Engelund et al.. Measurements of scattered light on a microchip flow cytometer with integrated polymer based optical elements [J]. Lab on a Chip, 2004, 4(4):372~377

    [12] [12] Su Bo, Cui Dafu, Liu Changchun et al.. Fabrication and study on PDMS electrophoresis chip with fiber [J]. Measurement & Control Technology, 2006, 20(6):5~8

    [14] [14] Wang Yawei, Han Guangcai, Liu Ying et al.. Light scattering virtual simulation of red blood cell under double curve symmetrical model [J]. Chinese J. Lasers, 2007, 34(12):1676~1681

    Tools

    Get Citation

    Copy Citation Text

    Jin Yonglong, Zhang Yu, Gu Ning. Fabrication of Microchip with Embedded Optical Fibers by Excimer Laser Processing Technique[J]. Chinese Journal of Lasers, 2008, 35(11): 1821

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Save article for my favorites
    Paper Information

    Category: laser manufacturing

    Received: Mar. 3, 2008

    Accepted: --

    Published Online: Nov. 17, 2008

    The Author Email: Yonglong Jin (hiroi@163.com)

    DOI:

    Topics