Fig. 1. Structure diagram of VCSEL and PIN monolithic integration[13]

Fig. 2. Structure of the proposed integrated optoelectronic chip

Fig. 3. Gain spectra for different barrier thicknesses of VCSEL

Fig. 4. Threshold current and slope efficiency for different oxidized sizes of VCSEL

Fig. 5. Reflection spectrum of VCSEL

Fig. 6. VCSEL unit’s performances. (a) Static performance; (b) dynamic performance

Fig. 7. PIN-PD units’ dynamic performance of the integrated chip pair

Fig. 8. Spectral photo-response performances of the integrated chip

Fig. 9. Current density distribution of the integrated optoelectronic chip while the VCSEL unit and the PIN-PD unit working simultaneously

Fig. 10. Electrical isolation of integrated chip. (a) PIN-PD unit isolation versus VCSEL unit; (b) VCSEL unit isolation versus PIN-PD unit