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Laser & Optoelectronics Progress, Volume. 51, Issue 10, 101403(2014)

Research on 3-Ray Automatic Alignment in High Power Excimer Laser MOPA System

Qian Hang*, Wang Dahui, Ma Lianying, Zhang Yongsheng, Zhao Xueqing, Zhu Yongxiang, and Yi Aiping
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    Article index updated: Oct. 6, 2025

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    Qian Hang, Wang Dahui, Ma Lianying, Zhang Yongsheng, Zhao Xueqing, Zhu Yongxiang, Yi Aiping. Research on 3-Ray Automatic Alignment in High Power Excimer Laser MOPA System[J]. Laser & Optoelectronics Progress, 2014, 51(10): 101403

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    Paper Information

    Category: Lasers and Laser Optics

    Received: Mar. 28, 2014

    Accepted: --

    Published Online: Sep. 10, 2014

    The Author Email: Qian Hang (bingtongst@163.com)

    DOI:10.3788/lop51.101403

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology