Chinese Journal of Lasers, Volume. 29, Issue s1, 592(2002)
Study of Beam Transformation in Excimer Laser Micromachining
References(3)
[1] [1] Yuan Weizheng, Ma Binghe. Micromachine and micrornachining technology. Xi'an: Northwesten Polytechnic University Press, 2000 (in Chinese)
[3] [3] Wan Ying, Zuo Tiechuan, Jiang Yijian. The imaging projection lens for excimer laser micro-machining. Proc. of SPIEy 2000’ 4222:361～365
[4] [4] Yu Daoyin, Tan Hengying. Engineering Optics. Beijing: Mechanical Industry Press, 1999(in Chinese)
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JING Tao, YING Bo-hua, CHEN Tao, JIANG Yi-jian, ZUO Tie-chuan. Study of Beam Transformation in Excimer Laser Micromachining[J]. Chinese Journal of Lasers, 2002, 29(s1): 592
Paper Information
Category: laser devices and laser physics
Received: --
Accepted: --
Published Online: Feb. 23, 2013
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