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Chinese Journal of Lasers, Volume. 29, Issue s1, 592(2002)

Study of Beam Transformation in Excimer Laser Micromachining

JING Tao, YING Bo-hua, CHEN Tao, JIANG Yi-jian, and ZUO Tie-chuan
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    According to the requirement of excimer laser micromachining, an optical system is designed by studying the beam property of the excimer laser.

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    excimer laserfield piecemicromachiningoptical system
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    JING Tao, YING Bo-hua, CHEN Tao, JIANG Yi-jian, ZUO Tie-chuan. Study of Beam Transformation in Excimer Laser Micromachining[J]. Chinese Journal of Lasers, 2002, 29(s1): 592

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    Paper Information

    Category: laser devices and laser physics

    Received: --

    Accepted: --

    Published Online: Feb. 23, 2013

    The Author Email:

    DOI:

    CSTR:32186.14.

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology