Journal of Synthetic Crystals, Volume. 54, Issue 3, 420(2025)

ε-Ga2O3 Growth on c-Plane Sapphire Substrate with Metal-Organic Chemical Vapor Deposition

WANG Ziming, ZHANG Yachao*, FENG Qian, LIU Shiteng, LIU Yuhong, WANG Yao, WANG Long, ZHANG Jincheng, and HAO Yue
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  • Division of Integrated Circuits, Xidian University, Xi 'an 710000, China
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    WANG Ziming, ZHANG Yachao, FENG Qian, LIU Shiteng, LIU Yuhong, WANG Yao, WANG Long, ZHANG Jincheng, HAO Yue. ε-Ga2O3 Growth on c-Plane Sapphire Substrate with Metal-Organic Chemical Vapor Deposition[J]. Journal of Synthetic Crystals, 2025, 54(3): 420

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    Paper Information

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    Received: Nov. 28, 2024

    Accepted: Apr. 23, 2025

    Published Online: Apr. 23, 2025

    The Author Email: ZHANG Yachao (ychzhang@xidian.edu.cn)

    DOI:10.16553/j.cnki.issn1000-985x.2024.0300

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