[5] [5] Kobaru Y, Kondo E, Iwamoto R. Ultra-precision cutting of single crystal silicon using diamond tool with large top corner radius[C]//International Conference on Precision Engineering, 2012,523-524: 81-86.

[6] [6] WANG C, CHENG K, Nelson N, et al. Cutting force-based analysis and correlative observations on the tool wear in diamond turning of single-crystal silicon[J].Proceedings of the Institution of Mechanical Engineers Part B Journal of Engineering Manufacture, 2014, DOI: 10.1177/0954405414543316.

[7] [7] Choi I H, Kim J D. Development of monitoring system on the diamond tool wear[J].International Journal of Machine Tools and Manufacture, 1999,39(3): 505-515.