Optics and Precision Engineering, Volume. 20, Issue 5, 1069(2012)
System-level modeling for MEMS optical components
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LI Xiao-ying, LI Hui-min, CHANG Hong-long, HE Yang, JIAO Wen-long. System-level modeling for MEMS optical components[J]. Optics and Precision Engineering, 2012, 20(5): 1069
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Received: Dec. 27, 2011
Accepted: --
Published Online: Aug. 8, 2012
The Author Email: LI Xiao-ying (xiaoy@nwpu.edu.cn)
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