Researching | Efficient Fabrication of Compound Refractive Lens for Hard X‐ray Using High‐Repetition‐Rate Femtosecond Laser

Chinese Journal of Lasers, Volume. 51, Issue 16, 1602405(2024)

Efficient Fabrication of Compound Refractive Lens for Hard X‐ray Using High‐Repetition‐Rate Femtosecond Laser

Xu He¹, Limin Meng¹, Yuncan Ma^1、*, He Lin², Jun Li¹, and Yan Ye¹

Author Affiliations

¹Institute of Fluid Physics, China Academy of Engineering Physics, Mianyang 621900, Sichuan , China

²Shanghai Advanced Research Institute, Chinese Academy of Sciences, Shanghai 201204, China

show less

Abstract Get PDF(in Chinese)

Figures&Tables (11)

References (26)

Paper Information

References(26)

[1] Zhao Z T, Feng C. X-ray free electron lasers[J]. Physics, 47, 481-490(2018).

[2] Li P, Li M, Wu D et al. Development strategy of free electron laser technology in China[J]. Strategic Study of CAE, 22, 35-41(2020).

[3] Liu X W, Liu H G, Zhang W K. X-ray free-electron lasers and their applications in ultrafast structural dynamics research[J]. Scientia Sinica (Physica, 52, 186-209(2022).

[4] Jiang H, Li A G. Frontier development of X-ray diffraction-limited nanofocusing[J]. Acta Optica Sinica, 42, 1134004(2022).

[5] Kirkpatrick P, Baez A V. Formation of optical images by X-rays[J]. Journal of the Optical Society of America, 38, 766-774(1948).

[6] Yumoto H, Mimura H, Koyama T et al. Focusing of X-ray free-electron laser pulses with reflective optics[J]. Nature Photonics, 7, 43-47(2013).

[7] Zhang S, Hou X. Research progress of high-precision surface metrology of a K-B mirror[J]. Chinese Optics, 13, 660-675(2020).

[8] Kirz J. Phase zone plates for X rays and the extreme UV[J]. Journal of the Optical Society of America, 64, 301-309(1974).

[9] Keskinbora K, Robisch A L, Mayer M et al. Multilayer Fresnel zone plates for high energy radiation resolve 21 nm features at 1.2 keV[J]. Optics Express, 22, 18440-18453(2014).

[10] Gao Y Z, Wu L J, Lu W E et al. Design of hard X-ray Fresnel zone plates based on rigorous coupled wave theory[J]. Acta Optica Sinica, 41, 1111002(2021).

[11] Snigirev A, Kohn V, Snigireva I et al. A compound refractive lens for focusing high-energy X-rays[J]. Nature, 384, 49-51(1996).

[12] Dudchik Y I, Komarov F F, Piestrup M A et al. Using of a microcapillary refractive X-ray lens for focusing and imaging[J]. Spectrochimica Acta Part B: Atomic Spectroscopy, 62, 598-602(2007).

[13] Lyatun S, Zverev D, Ershov P et al. X-ray reflecto-interferometer based on compound refractive lenses[J]. Journal of Synchrotron Radiation, 26, 1572-1581(2019).

[14] Snigireva I, Vaughan G B M, Snigirev A et al. High-energy nanoscale-resolution X-ray microscopy based on refractive optics on a long beamline[C], 1365, 188-191(2011).

[15] Barannikov A, Polikarpov M, Ershov P et al. Optical performance and radiation stability of polymer X-ray refractive nano-lenses[J]. Journal of Synchrotron Radiation, 26, 714-719(2019).

[16] Medvedskaya P, Lyatun I, Shevyrtalov S et al. Diamond refractive micro-lenses for full-field X-ray imaging and microscopy produced with ion beam lithography[J]. Optics Express, 28, 4773-4785(2020).

[17] Isakovic A F, Stein A, Warren J B et al. Diamond kinoform hard X-ray refractive lenses: design, nanofabrication and testing[J]. Journal of Synchrotron Radiation, 16, 8-13(2009).

[18] Antipov S, Baryshev S V, Butler J E et al. Single-crystal diamond refractive lens for focusing X-rays in two dimensions[J]. Journal of Synchrotron Radiation, 23, 163-168(2016).

[19] Polikarpov M, Barannikov A, Zverev D et al. Laboratory and synchrotron tests of two-dimensional parabolic X-ray compound refractive lens made of single-crystal diamond[J]. Proceedings of SPIE, 9964, 99640J(2016).

[20] Gasilov S, Mittone A, dos Santos Rolo T et al. Refraction and ultra-small-angle scattering of X-rays in a single-crystal diamond compound refractive lens[J]. Journal of Synchrotron Radiation, 24, 1137-1145(2017).

[21] Lyubomirskiy M, Schurink B, Makhotkin I A et al. Planar refractive lenses made of SiC for high intensity nanofocusing[J]. Optics Express, 29, 14025-14032(2021).

[22] Chen H, Wei C Y, Cao Z et al. Study of femtosecond laser ablation and polishing process on RB-SiC surface[J]. Chinese Journal of Lasers, 50, 2402203(2023).

[23] Ali B, Litvinyuk I V, Rybachuk M. Femtosecond laser micromachining of diamond: current research status, applications and challenges[J]. Carbon, 179, 209-226(2021).

[24] Xu S J, Yu Y H, Chen Q D. Water-assisted femtosecond laser silicon carbide micro-hole machining(invited)[J]. Acta Photonica Sinica, 50, 0650106(2021).

[25] Jens A-N, Mcmorrow D[M]. Elements of modern X-ray physics, 102-106(2010).

[26] He X, Ma Y C, Li J et al. Method and application of femtosecond laser processing on non-flat surfaces[J]. Laser & Optoelectronics Progress, 60, 1714009(2023).

Tools

Get Citation

Copy Citation Text

Xu He, Limin Meng, Yuncan Ma, He Lin, Jun Li, Yan Ye. Efficient Fabrication of Compound Refractive Lens for Hard X‐ray Using High‐Repetition‐Rate Femtosecond Laser[J]. Chinese Journal of Lasers, 2024, 51(16): 1602405

Download Citation

EndNote(RIS)BibTex Plain Text

Set citation alerts for article

Save article for my favorites

Paper Information

Category: Laser Micro-Nano Manufacturing

Received: Oct. 10, 2023

Accepted: Dec. 5, 2023

Published Online: Jul. 24, 2024

The Author Email: Yuncan Ma (mayuncan@caep.cn)

DOI:10.3788/CJL231269

CSTR:32183.14.CJL231269

Topics

laser devices and laser physics

Lasers and Laser Optics

laser manufacturing

Instrumentation, Measurement and Metrology