Fig. 1. Silicon unimorph DM. Left, structure of the DM; right, photo of the fabricated DM.

Fig. 2. Experimental setup of the closed-loop correction system.

Fig. 3. Stroke of the DM. Left, central actuator at 50 V; right, ring actuator at 60 V.

Fig. 4. Closed-loop correction of the initial mirror wavefront. Insets, mirror wavefront before and after correction.

Fig. 5. Zernike shapes from the third to 35th mode reproduced in closed-loop form. PV refers to PV wavefront and ER refers to RMS wavefront residual error.

Fig. 6. RMS wavefront and RMS residual wavefront error of the reproduced Zernike shapes. Inset, normalized residual wavefront error.

Fig. 7. RMS ocular wavefront aberrations before and after correction (without piston and tip/tilt).