Chinese Optics, Volume. 13, Issue 1, 203(2020)
Intermixing in InGaAs/AlGaAs quantum well structures induced by the interdiffusion of Si impurities
[2] [2] JIA Y, YU Q N, LI F, et al.. Experimental investigation of loss and gain characteristics of an abnormal InxGa1-xAs/GaAs quantum well structure[J]. Chinese Optics Letters, 2018, 16(1): 011402.
[3] [3] GU L, LI L, QIAO ZH L, et al.. High-strain InGaAs/GaAs quantum well grown by MOCVD[J]. Chinese Optics Letters, 2014, 12(10): 102702.
[4] [4] HUO D Y, SHI ZH W, ZHANG W, et al.. Barrier growth temperature of InGaAs/AlGaAs-quantum well infrared photodetector[J]. Acta Physica Sinica, 2017, 66(6): 068501. (in Chinese)
[6] [6] LIN SH J, LI J J, HE L J, et al.. Enhanced AlGaAs/InGaAs quantum well intermixing by the technology of cycles annealing[J]. Journal of Optoelectronics·Laser, 2014, 25(8): 1471-1475. (in Chinese)
[7] [7] MEI P, YOON H W, VENKATESAN T, et al.. Kinetics of silicon-induced mixing of AlAs-GaAs superlattices[J]. Applied Physics Letters, 1987, 50(25): 1823-1825.
[8] [8] CONG G W, AKIMOTO R, GOZU S, et al.. Simultaneous generation of intersubband absorption and quantum well intermixing through silicon ion implantation in undoped InGaAs/AlAsSb coupled double quantum wells[J]. Applied Physics Letters, 2010, 96(10): 101901.
[9] [9] PENG H T. Improving the COD level of high-power semiconductor lasers using quantum well intermixing[D]. Tianjin: Hebei University of Technology, 2007. (in Chinese)
[10] [10] SHINDE S S, BHOSALE C H, RAJPURE K Y. Solar light assisted photocatalysis of water using a zinc oxide semiconductor[J]. Journal of Semiconductors, 2013, 34(4): 043002.
[11] [11] ZHOU L. Research on anti catastrophic optical damage of high power semiconductor laser diodes[D]. Changchun: Changchun University of Science and Technology, 2014. (in Chinese)
[12] [12] ZHAO J Y, GUO J, HUANG X D, et al.. Spatial control based quantum well intermixing in InP/InGaAsP structures using ICP[J]. Journal of Semiconductors, 2012, 33(10): 106001.
[13] [13] TIAN W N, XIONG C, WANG X, et al.. Impurity-free vacancy diffusion induces intermixing in GaInP/AlGaInP quantum wells using GaAs encapsulation[J]. Chinese Journal of Luminescence, 2018, 39(8): 1095-1099.
[14] [14] WANG X, ZHAO Y H, ZHU L N, et al.. Impurity-free vacancy diffusion induces quantum well intermixing in 915 nm semiconductor laser based on SiO2 film[J]. Acta Photonica Sinica, 2018, 47(3): 94-100. (in Chinese)
[15] [15] LEE J, DOI K, HIRATANI T, et al.. High quality quantum-well intermixing for InP-based membrane photonic integration on Si[C]. Proceedings of the 26th International Conference on Indium Phosphide and Related Materials, IEEE, 2014: 1-2.
[16] [16] DEPPE D G, HOLONYAK JR N. Atom diffusion and impurity-induced layer disordering in quantum well III-V semiconductor heterostructures[J]. Journal of Applied Physics, 1988, 64(12): R93-R113.
[17] [17] FANG X H, BAO X M. Study on mechanism of Si diffusion in GaAs[J]. Chinese Journal of Semiconductors, 1996, 17(12): 919-922. (in Chinese)
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LIU Cui-cui, LIN Nan, XIONG Cong, MAN Yu-xuan, ZHAO Bi-yao, LIU Su-ping, MA Xiao-yu. Intermixing in InGaAs/AlGaAs quantum well structures induced by the interdiffusion of Si impurities[J]. Chinese Optics, 2020, 13(1): 203
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Received: Mar. 15, 2019
Accepted: --
Published Online: Mar. 9, 2020
The Author Email: LIU Cui-cui (sissiliu@semi.ac.cn)